This project was selected as EU Descartes Prize finalist 

Press release of European Commission
«Scientific Excellence for Society»   Download The Press release

The MEMSWAVE partners at the Dscartes Prise Award Ceremony. From left to right: F. Giacomozzi (Italy); B. Szentpali (Hungary); A. Muller (Romania); G. Konstantinidis (Greece); V.F. Mitin (Ukraine).
5 December 2002, European Patent Office, Munich, Germany

INCO-COPERNICUS Project # 977131

Project duration:  October 1998 – October 2001

Supported by the EU in the framework of the INCO-COPERNICUS program. This Project joined together nine groups of scientists from West- and Central/East-European research centres and universities with complementary activities in the field of semiconductor technology, microsystems and microwave devices.


The new topic for the European scientific community, the development of MEMS (Micro-Electro-Mechanical Systems) for radio-frequency applications, is the major objective of this Project.

Another objective of the Project is to develop a new generation of microwave and millimetre wave circuits using new modelling and design concepts, as well as advanced silicon and III-V semiconductor compounds micromachining.

The Project contributes to micromachining technology transfer from laboratory experiments to wide industrial use, with the micromachined passive components and co-integration of MEMS with IC’s, as well as with innovative radio frequency transducers in the microwave and millimetre wave areas. New micromachining techniques for fabrication of the dielectric and semiconductor membranes, as well as the active (IMPATT diodes, switching and varactor diodes) and passive (millimetre wave antennae and filtre structures) micromachined elements, were developed.

The final task of the MEMSWAVE Project is the design and manufacturing of transmitting and receiving micromachined integrated modules in the millimetre wave range (38 GHz), as well as receiving micromachined modules for 77 GHz.

 The main application areas for the MEMSWAVE products: 

  • local “point-to-point” and “point-to-multipoint” distribution systems
  • satellite communication systems
  • mobile radio communication systems equipped with the broad-band satellite communication
  • lines intended for the millimetre wavelength range
  • automotive collision-avoidance radars
  • radar alarm systems


Project participants and contact persons:

Institute for Research and Development in Microtechnologies (IMT), Bucharest, Romania – Coordinating Institution

   Prof. Dr. Dan Dascalu

   Dr. Alexandru Muller

CNR-PSM-M2T, Rome, Italy

   Dr. Romolo Marcelli

Tor Vergata University, Rome, Italy

   Dr. Flavio Giacomozzi

ITC-IRST, Trento, Italy

   Dr. Giancarlo Bartolucci

FORTH, Heraklion, Greece

Dr. George Constantinidis

University of Uppsala, Uppsala, Sweden

   Dr. Klas Hjort

HAS-RITPMS, Budapest, Hungary

   Dr. Bela Szentpali

Institute of Semiconductor Physics (ISP) of the National Academy of Sciences of Ukraine, Kiev, Ukraine

   Prof. Dr. Raisa Konakova

Research & Production Company MicroSensor Ltd (MicroSensor), Kiev, Ukraine

   Dr. Vadim Mitin

The main results: MEMSWAVE Booklet Download the Booklet